Semiconductor Application in Real Life

For the past few weeks we shined the spotlight on the Semiconductor Application; we've looked at WHAT happens in a facility and WHY monitoring is necessary in the different parts of the facilities (PPM,

Area Monitoring of Storage Areas in Semiconductor Facilities

Hazardous gases are stored and distributed in the semiconductor plant, which includes:

  1. Storage Areas
  2. Distribution
  3. Delivery Piping

In these operations there exists the possibility that the hazardous gas could accidentally leak or spill into the surrounding area. Pumps, control valves, manifolds, piping junctions, fittings and connections are some of the potential sources for leaks or spills. With so many opportunities for leakage, continuous monitoring of such hazards is an essential part of keeping the plant safe.

Flammability Monitoring of LFL/LEL Levels in Semiconductor Facilities

Process tools are enclosed areas in which specific wafer processing functions occur. Any process tools handling flammable gases require a hazardous gas detection system to ensure safety and be in compliance to codes. The FM standard states that “ventilation shall be provided for all tools handling flammable and combustible liquids. Ventilation shall be provided to ensure the atmosphere does not exceed 25% of the LEL (LFL) in the event of the largest possible leak.”

Parts Per Million Detection in Semiconductor Facilities

Containers of hazardous gases, both flammable and toxic, are often isolated from the surrounding environment by safety enclosures (gas cabinets). Some process tools have a gas control enclosure section that serves the same purpose as a gas cabinet. It is important to monitor these enclosures for leaking gas to save product as well as prevent a toxic condition. The cabinets and enclosures are ventilated to prevent the buildup of any leaking gas.

Application Spotlight: Semiconductor

Semiconductor manufacturing facilities employ a number of hazardous gases in their production processes.

Pollution Control in Real Life

For the past couple weeks we shined the spotlight on the Pollution Control Industry; we've looked at the three ways to reduce emissions (Oxidizers, Incineration & Solvent Recovery). This week let's discuss HOW, by looking at real life applications:

Pollution Control: Solvent Recovery

Solvent recovery systems recover and re-use solvents from manufacturing processes. Solvent laden air from the processes is passed through an activated carbon bed. When the carbon bed is nearly saturated with solvent, a steam-down cycle occurs to condense out the solvent for re-use. The carbon is then regenerated for another collection phase. Two carbon beds are used so that one bed can process the solvent-laden air while the other one is regenerating.

Pollution Control: Incineration/Flare Stacks

It is becoming increasingly important to reduce emissions while saving energy when using a pollution control device such as a flare stack. Proper flare stack design is essential to handle their multiple waste streams for maximum performance with minimum emissions. Since destruction efficiency and emissions (both visible and invisible) are some of the most important criteria to consider when designing a flare, when the design is done correctly, dramatic money savings will also be realized.

Pollution Control: Incineration/Oxidizers

A flame ionization detector at the outlet of the oxidizer ensures that it does not exceed emission levels. In addition, by using two flame ionization detectors, one on the inlet and one on the outlet, hydrocarbons can be measured and compared before and after processing, indicating efficiency.

Application Spotlight: Pollution Control

Air pollution control devices are a series of devices that work to prevent a variety of different pollutants, both gaseous and solid, from entering the atmosphere primarily out of industrial smokestacks. These control devices can be separated into two broad categories - devices that control the amount of particulate matter escaping into the environment and devices that control acidic gas emissions.

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